Serial Number:
76666541
Mark:
HEIGHT MAPPER (ZMAP)
Status:
Abandoned-Express
Status Date:
07-26-2007
Filing Date:
Registration Number:
N/A
Registration Date:
N/A
Components of optical instruments for use in the semiconductor industry, namely, apparatus comprised of computer software for use in analyzing data received from an overlay metrology tool and overlay targets with corresponding half-shade plates located either above or below the reticle plane, the whole in the same form factor as a standard reticle for use in exposing images on wafers that are used for assessing and adjusting the focus of a lithographic stepper or step and scan tool
Mark Description:
N/A
Class:
Scientific
Type of Mark:
Trademark
Published for Opposition Date:
N/A
Owner:
Mark Drawing Status:
Standart Character Mark
Abandon Date:
07-25-2007
Business Name:
LITEL INSTRUMENTS
Correspondent Name:
